Micromachined Flow Sensors in Biomedical Applications

Micromachined Flow Sensors in Biomedical Applications

Application fields of micromachined devices are growing very rapidly due to the continuous improvement of three dimensional technologies of micro-fabrication. In particular, applications of micromachined sensors to monitor gas and liquid flows hold immense potential because of their valuable characteristics (e.g., low energy consumption, relatively good accuracy, the ability to measure very sma...

Micromachined Thermal Flow Sensors - A Review

Microfabrication has greatly matured and proliferated in use amongst many disciplines. There has been great interest in micromachined flow sensors due to the benefits of miniaturization: low cost, small device footprint, low power consumption, greater sensitivity, integration with on-chip circuitry, etc. This paper reviews the theory of thermal flow sensing and the different configurations and ...

Magnetic Sensors for Biomedical Applications

Micromachined fluid ejector arrays for biotechnological and biomedical applications

In this paper, we present a micromachined flextensional droplet ejector array for use to eject liquids. By placing a fluid behind one face of a vibrating circular plate that has an orifice at its center, we achieve contiuuous and drop-ondemand ejection of the fluid. We present results of ejection of water and isopropanol. The ejector is harmless to sensitive fluids and can he used to eject fuel...

Novel Design and Signal Transduction Concepts of Micromachined Flow Sensors

In this work we investigate a novel design approach and signal transduction concepts for micromachined calorimetric flow sensors. Maintaining a constant average excess temperature of the membrane by means of a simple two-state electronic controller, a pulse modulated actuation signal is obtained. The sensitivity of the output signal can be influenced by altering the amplitude of the heating pul...